Raman spectral mapping of self-aligned carbon nanowalls
Raman spectral mapping of self-aligned carbon nanowalls
复制标题
DOI：
10.7567/jjap.53.05fd10
复制
发表时间：
2014-04
影响因子：
1.5
通讯作者：
T. Kawahara;S. Yamaguchi;Y. Ohno;K. Maehashi;K. Matsumoto;K. Okamoto;R. Utsunomiya;Teruaki Matsuba;Y. Matsuoka;M. Yoshimura
中科院分区：
文献类型：
--
作者：
T. Kawahara;S. Yamaguchi;Y. Ohno;K. Maehashi;K. Matsumoto;K. Okamoto;R. Utsunomiya;Teruaki Matsuba;Y. Matsuoka;M. Yoshimura
碳纳米墙（CNW）是一种由几层石墨烯构成的纳米碳材料，因此可能表现出与石墨烯相似的特性。我们开发了一种利用图形外延技术创建碳纳米墙的自对准工艺，该工艺可用于场效应晶体管的结构制造。我们使用拉曼光谱图来研究自对准过程的机制。生长对温度的依赖性和拉曼光谱的使用使得能够观察几何催化剂效应并诱导自对准区域的缺陷。当分析沉积对时间的依赖性时，观察到相同的效果。对于对应于初始生长的低温生长，仅在加工图案的边缘可以观察到 CNW 薄片的生长。另一方面，自对准过程会改变薄片的形状，从而影响晶粒结构并引起载流子散射。因此，石墨外延的使用有助于初始生长，然后主要引起 CNW 薄膜的缺陷。最后，这些缺陷随着过度生长而被治愈。
Carbon nanowalls (CNWs) are a nano-carbon material constructed with a few layers of graphene and thus may exhibit similar properties to graphene. We developed a self-alignment process for the creation of carbon nanowalls using graphoepitaxy, which can be used for the structural fabrication of field-effect transistors. We used Raman spectral mapping to study the mechanism of the self-alignment process. The dependence of growth on temperature and the use of Raman spectra enabled the observation of geometrical catalyst effects and the induction of defects for self-aligned regions. The same effects were observed when analyzing the dependence of deposition on time. For low-temperature growth, which corresponds to the initial growth, the growth of CNW flakes can be observed only on the edge of processed patterns. On the other hand, the self-alignment process should change the shape of the flakes, thereby affecting grain structures and inducing carrier scattering. The use of graphoepitaxy can therefore help in the initial growth, and then mainly induces defects in CNW films. Finally, these defects are cured with the overgrowth.