High Temperature Stable Anatase Phase Titanium Dioxide Films Synthesized by Mist Chemical Vapor Deposition
High Temperature Stable Anatase Phase Titanium Dioxide Films Synthesized by Mist Chemical Vapor Deposition
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DOI：
10.3390/nano10050911
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发表时间：
2020-05
期刊：
影响因子：
5.3
通讯作者：
Qiang Zhang;Chaoyang Li
中科院分区：
文献类型：
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作者：
Qiang Zhang;Chaoyang Li
采用喷雾化学气相沉积法成功制备了耐高温稳定的纯锐钛矿相二氧化钛薄膜。在氧气气氛中在600至1100 °C的温度范围内对合成的膜进行后退火处理，并且在高达1000 °C的温度下没有观察到金红石向金红石的转变。基于掠入射X射线衍射数据，二氧化钛薄膜的平均晶粒尺寸随着退火温度的升高而逐渐增大。结构分析表明，高的热稳定性的α相可以归因于小的晶粒尺寸和片状晶粒结构。在1100 °C下退火后观察到不完全的金红石向金红石的转变。
Pure anatase-phase titanium dioxide films stable up to high temperatures were successfully fabricated by the mist chemical vapor deposition method. A post-annealing treatment of the synthesized films was carried out in oxygen atmosphere in the temperature range from 600 to 1100 °C and no anatase to rutile transformation was observed up to 1000 °C. Based on the grazing incidence X-ray diffraction data, the average crystallite size of the titanium dioxide films increased gradually with increasing annealing temperature. The structural analysis revealed that the high thermal stability of the anatase phase can be attributed to the small crystallite size and a sheet-like grain structure. An incomplete anatase to rutile transformation was observed after annealing at 1100 °C.