Development of in situ pH sensor using ISFET

Development of in situ pH sensor using ISFET
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使用 ISFET 开发原位 pH 传感器

DOI:
10.1109/ut.2002.1002403
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发表时间:
2002
期刊:
Proceedings of the 2002 Interntional Symposium on Underwater Technology (Cat. No.02EX556)
影响因子:
--
通讯作者:
H. Henmi
H. Henmi
中科院分区:
--
文献类型:
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作者:
K. Shitashima;M. Kyo;Y. Koike;H. Henmi

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原位化学传感器的发展对于了解海洋化学和生物过程起着关键作用。海水的pH值是控制的重要因素。 ISFET是一种可以测量水介质中氢离子浓度的半导体。我们开发了原位 pH 传感器,采用 ISFET 作为 pH 电极,Cl-ISE 作为参比电极。 pH传感器具有响应快(几秒内)、高精度(/spl plusmn/0.005pH)和耐压性能。
The development of in situ chemical sensor plays a key role in understanding of chemical and biological processes in the ocean. The pH of the seawater is the important factor that controls the. The ISFET is a semiconductor that can measure hydrogen ion concentration in aqueous media. We developed the in situ pH sensor that employs the ISFET as a pH electrode, and the Cl-ISE as a reference electrode. The pH sensor has a quick response (within a few second), high accuracy (/spl plusmn/0.005pH) and pressure-resistant performance.