Modeling of MOEMS electromagnetic scanning grating mirror for NIR micro-spectrometer
Modeling of MOEMS electromagnetic scanning grating mirror for NIR micro-spectrometer
复制标题
近红外微型光谱仪MOEMS电磁扫描光栅镜建模
DOI：
10.1063/1.4942973
复制
发表时间：
2016-02-01
期刊：
影响因子：
1.6
通讯作者：
Yang, Tingyan
中科院分区：
文献类型：
--
作者：
Zhou, Ying;Wen, Quan;Yang, Tingyan
为研究MOEMS扫描镜的详细电磁机理，建立了数学模型。给出了光谱范围与扫描角度的关系。此外，还详细研究了MOEMS扫描镜在不同长宽比和不同扭转杆尺寸下的谐振频率和最大扭转角的变化趋势。数值计算结果和有限元模拟结果都表明，扭转杆的厚度是最重要的影响因素。当纵横比等于1时，出现最大扭转角。该数学模型是实际制造中设计MOEMS电磁扫描光栅反射镜的有效方法。
In this paper, the mathematical model is developed for researching the detailed electromagnetic mechanism of MOEMS scanning mirror. We present the relationship between spectral range and optical scanning angle. Furthermore, the variation tendencies of resonant frequency and maximal torsional angle are studied in detail under different aspect ratios of MOEMS scanning mirror and varied dimensions of torsional bar. The numerical results and Finite Element Analysis simulations both indicate that the thickness of torsional bar is the most important factor. The maximal torsional angle appears when the aspect ratio equals to 1. This mathematical model is an effective way for designing the MOEMS electromagnetic scanning grating mirror in actual fabrication.