A Scanning Force Microscope Combined with a Scanning Electron Microscope for Multidimensional Data Analysis
A Scanning Force Microscope Combined with a Scanning Electron Microscope for Multidimensional Data Analysis
复制标题
扫描力显微镜与扫描电子显微镜相结合，用于多维数据分析
DOI：
10.1051/mmm:1997130
复制
发表时间：
1997
期刊：
影响因子：
--
通讯作者：
G. Shang
中科院分区：
文献类型：
--
作者：
M. Troyon;H. Lei;Zhonghuai Wang;G. Shang
描述了一种扫描力显微镜（SFM），用于扫描电子显微镜（SEM）内部的操作。这种组合仪器允许人们通过扫描电镜对样品进行常规成像，并通过SFM调查局部地形以及表面的某些物理特性（例如，摩擦和弹性）。这两种显微镜的组合非常有吸引力，因为它们在景深、横向和垂直分辨率、视野、速度和对绝缘表面成像的能力方面互为补充。相对于样品表面相同区域的多维数据空间可以被构建，这应该有助于对材料的性质提供新的见解。
A scanning force microscope (SFM) intended for operation inside a scanning electron microscope (SEM) is described. This combined instrument allows one to image a sample conventionally by SEM and to investigate by SFM the local topography as well as certain physical characteristics of the surface (e.g., friction and elasticity). The combination of the two microscopes is very attractive because they complement each other in terms of depth of field, lateral and vertical resolution, field of view, speed and ability to image insulating surfaces. A multi-dimensional data space relative to the same area of a sample surface can be constructed, which should help to give new insights into the nature of materials.