Effects of Diffusion-Barrier-Patterning on Formation of Position-Controlled Ge-on- Insulator by Gold-Induced Crystallization at Low Temperatures (≦300℃)
Effects of Diffusion-Barrier-Patterning on Formation of Position-Controlled Ge-on- Insulator by Gold-Induced Crystallization at Low Temperatures (≦300℃)
复制标题
扩散势垒图案化对低温(≤300℃)金诱导结晶形成位置控制的绝缘体上Ge的影响
DOI:
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发表时间:
2015
期刊:
影响因子:
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通讯作者:
and T. Sadoh
中科院分区:
文献类型:
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作者:
R. Aoki;J-H Park;M. Miyao;and T. Sadoh