Performance of GAA poly-Si channel of junctionless field effect transistors with ultra-thin body

Performance of GAA poly-Si channel of junctionless field effect transistors with ultra-thin body
复制标题

DOI:
--
复制
发表时间:
2015-06
期刊:
2015 Silicon Nanoelectronics Workshop (SNW)
影响因子:
--
通讯作者:
Yan-Bo Liu;Y. Jhan;Cheng-Ping Wang;Yung-Chun Wu
Yan-Bo Liu;Y. Jhan;Cheng-Ping Wang;Yung-Chun Wu
中科院分区:
其他
文献类型:
--
作者:
Yan-Bo Liu;Y. Jhan;Cheng-Ping Wang;Yung-Chun Wu

文献摘要

被引文献

相似文献

具有沟槽结构的玛瑙全包围(GAA)多晶硅沟道无结场效应晶体管(JL-FET)已被成功地展示。该结型场效应晶体管具有低的漏致势垒降低(DIBL)、约70 mV/decade的亚阈值摆幅(SS)和高的ION/IOFF比(>108)。
Agate-all-around (GAA) with trench structure poly-Si channel junctionless Field-Effect Transistor (JL-FET) has been successfully demonstrated. This JL-FET shows excellent performance in a low drain-induced barrier lowering (DIBL), a steep Sub-threshold Swing (SS) ~70 mV/decade and high ION/IOFF (>108) ratio.