Dielectric data of ceramic substrates at high frequencies
Dielectric data of ceramic substrates at high frequencies
复制标题
DOI：
10.1016/s0955-2219(03)00580-6
复制
发表时间：
2004
影响因子：
5.7
通讯作者：
A. Stiegelschmitt;A. Roosen;C. Ziegler;S. Martius;L. Schmidt
中科院分区：
文献类型：
--
作者：
A. Stiegelschmitt;A. Roosen;C. Ziegler;S. Martius;L. Schmidt
氧化铝和 LTCC 等标准陶瓷基板的介电常数已在 1 至 50 GHz 的频率范围内确定。为了进行测量，已经准备好了基板上的圆柱形盘谐振器和印刷微带线谐振器。射频数据已使用网络分析仪和合适的晶圆探针台进行测量，介电数据的计算已基于两种不同的模拟程序进行。两种谐振器方法的样品制备和测试条件已被证明可以在较宽的频率范围内产生可靠的结果。
The dielectric constants of standard ceramic substrates like alumina and LTCC have been determined in the frequency range from 1 to 50 GHz. For the measurements cylindrical disk resonators and printed microstrip line resonators on substrates have been prepared. The RF-data have been measured with network analyzers and suitable wafer probe stations, the calculations of the dielectric data have been done on basis of two different simulation programs. The preparation of the samples and the test conditions of both resonator methods have proven to yield reliable results over a wide frequency range.