Adsorption and decomposition of acetylene on Si(100)-(2×1)
Adsorption and decomposition of acetylene on Si(100)-(2×1)
复制标题
乙炔在Si(100)-(2×1)上的吸附与分解
DOI：
10.1021/ja00043a020
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发表时间：
1992
影响因子：
15
通讯作者：
J. Yates
中科院分区：
文献类型：
--
作者：
P. Taylor;R. Wallace;C. Cheng;W. Weinberg;M. Dresser;W. J. Choyke;J. Yates
用俄歇电子能谱、程序升温脱附和四极质谱计测量乙炔在单层形成过程中的分压变化，研究了乙炔在超高真空条件下在Si(100)-(2×1)上的吸附和分解。发现乙炔通过流动前驱体在Si(100)-(2×1)上化学吸附。从前驱体脱附的活化能与从前驱体反应进入化学吸附状态的活化能之差为(Ed-Er)=1.9±0.6kcal·mol-1
The adsorption and decomposition of acetylene on Si(100)-(2×1) have been studied in ultrahigh vacuum by Auger electron spectroscopy, temperature-programmed desorption, and changes in the partial pressure of acetylene as measured by a quadrupole mass spectrometer during the formation of a monolayer. Acetylene was found to chemisorb onto Si(100)-(2×1) via a mobile precursor. The difference between the activation energy for desorption from the precursor and that for reaction from the precursor into the chemisorbed state was found to be (E d -E r )=1.9±0.6 kcal mol -1