Development of piezoelectric micromachined ultrasonic transducers
Development of piezoelectric micromachined ultrasonic transducers
复制标题
DOI：
10.1016/j.sna.2003.11.022
复制
发表时间：
2004-03-15
影响因子：
4.6
通讯作者：
Bandyopadhyay, A
中科院分区：
文献类型：
--
作者：
Akasheh, F;Myers, T;Bandyopadhyay, A
压电微机械超声换能器（pMUT）是MEMS技术应用于超声产生和检测的一个例子，其预期提供比传统换能器更多的优点。在这项工作中，我们研究pMUT通过新的设计和制造方法。有限元（FE）模型，与原始工具来测量设备的性能，被开发来设计和优化pMUT。一个pMUT的工作范围为2-10 MHz的水和具有最大的能量耦合系数的建模，设计，制造，并测试其谐振频率和耦合系数。共振频率的模型预测与测量值非常吻合，但由于测量耦合系数的可变性，耦合系数的预测结果并不理想。与传统的超声换能器相比，pMUT表现出超过100%的上级带宽，并提供相当大的设计灵活性，这使得它们的工作频率和声阻抗能够针对许多应用进行定制。(C)2003 Elsevier B. V.保留所有权利。
Piezoelectric micromachined ultrasonic transducers (pMUTs) are an example of the application of MEMS technology to ultrasound generation and detection, which is expected to offer many advantages over conventional transducers. In this work, we investigate pMUTs through novel design and fabrication methods. A finite element (FE) model, with original tools to measure device performance, was developed to design and optimize pMUTs. A pMUT for the operating range of 2-10 MHz in water and having maximized energy coupling coefficient was modeled, designed, fabricated, and tested for its resonance frequency and coupling coefficient. The model predictions for the resonance frequency were in excellent agreement with the measured values, but not as good for the coupling coefficient due to the variability in the measured coupling coefficient. Compared to conventional ultrasonic transducers, pMUTs exhibit superior bandwidth, in excess of 100%, and offer considerable design flexibility, which allows their operation frequency and acoustic impedance to be tailored for numerous applications. (C) 2003 Elsevier B.V. All rights reserved.