Resonant Magnetometer for Ultralow Magnetic Field Detection by Integrating Magnetoelastic Membrane on Film Bulk Acoustic Resonator
Resonant Magnetometer for Ultralow Magnetic Field Detection by Integrating Magnetoelastic Membrane on Film Bulk Acoustic Resonator
复制标题
通过在薄膜体声谐振器上集成磁弹膜实现超低磁场检测的谐振磁力计
DOI：
10.1109/tuffc.2022.3144392
复制
发表时间：
2022-04-01
影响因子：
3.6
通讯作者：
Mu, Xiaojing
中科院分区：
文献类型：
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作者：
Chen, Cong;Bai, Libing;Mu, Xiaojing
在这里，我们报告了一个复合纳米机械共振磁强计与磁致弹性薄膜集成在一个薄膜体声波谐振器（FBAR）的表面。通过利用磁弹性薄膜的delta-E效应和压电薄膜的谐振特性，我们从理论和实验上证明了这种复合结构能够实现超高的谐振频率和优异的磁场灵敏度，从而大大提高了弱磁场检测的极限。所提出的基于FBAR的谐振磁力计在没有结构优化的概念验证设备中实现了137 kHz/Oe的最大磁灵敏度，对应于低至7 nT/Hz 1/2的噪声等效功率。进一步的研究表明，通过优化磁敏层和压电层的厚度，可以获得前所未有的5 GHz/Oe的灵敏度，同时对低至190 ${f}\text{T}$ /Hz 1/2的弱磁场的检测极限。我们的工作为民用和军事应用中的超低磁场检测提供了一条新的令人兴奋的途径。
Here, we report on a composite nanomechanical resonant magnetometer with magnetoelastic thin film integrated on the surface of a film bulk acoustic resonator (FBAR). By exploiting the delta-E effect of magnetoelastic thin film and resonance characteristic in piezoelectric thin film, we theoretically and experimentally demonstrate the capability to realize ultrahigh resonance frequency and excellent magnetic field sensitivity in such composite configuration, thereby greatly improving the limit of detection of weak magnetic field. The proposed FBAR-based resonant magnetometer achieves maximum magnetic sensitivity of 137 kHz/Oe in a proof-of-concept device without structural optimization, corresponding to a noise equivalent power as low as 7 nT/Hz1/2. Further study indicates that by optimizing the thicknesses of the magnetic sensitive layer and piezoelectric layer, an unprecedented sensitivity of 5 GHz/Oe with an exceptional limit of detection of weak magnetic field down to 190 ${f}\text{T}$ /Hz1/2 could be potentially achieved. Our work provides a forward new and exciting route toward ultralow magnetic field detection in civilian and military applications.