Regression analysis of the effect of bias voltage on nano- and macrotribological properties of diamond-like carbon films deposited by a filtered cathodic vacuum arc ion-plating method
Regression analysis of the effect of bias voltage on nano- and macrotribological properties of diamond-like carbon films deposited by a filtered cathodic vacuum arc ion-plating method
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DOI：
10.1155/2014/657619
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发表时间：
2014
影响因子：
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通讯作者：
S. Miyake;Takanori Shindo;M. Miyake
中科院分区：
文献类型：
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作者：
S. Miyake;Takanori Shindo;M. Miyake
采用弯曲过滤阴极真空弧(FCVA)技术，在直流偏压和脉冲偏压下沉积了类金刚石(DLC)薄膜。利用原子力显微镜研究了不同偏置电压对纳米压痕和纳米线性能的影响。在-50V的直流偏压下沉积的DLC薄膜在约50 GPa时具有最高的硬度、较低的损耗模数、较低的弹性模数与纳米压痕硬度比以及较高的纳米级电阻。纳米压痕硬度与拉曼峰比ID/Ig呈正相关，而磨损深度与拉曼峰比呈负相关。这些纳米摩擦学性能高度依赖于薄膜的纳米结构。用圆盘球试验研究了FCVA-DLC薄膜的摩擦学性能。在直流偏压下沉积的DLC薄膜的平均摩擦系数低于在脉冲偏压下沉积的DLC薄膜。由球盘试验计算的摩擦系数与干燥条件下的纳米压痕硬度相关。然而，在边界润滑条件下，摩擦系数和比磨损率与纳米压痕硬度几乎没有相关性，磨损行为似乎受到其他因素的影响，如薄膜与基材的结合强度。
Diamond-like carbon (DLC) films are deposited by bend filtered cathodic vacuum arc (FCVA) technique with DC and pulsed bias voltage. The effects of varying bias voltage on nanoindentation and nanowear properties were evaluated by atomic force microscopy. DLC films deposited with DC bias voltage of -50V exhibited the greatest hardness at approximately 50 GPa, a low modulus of dissipation, low elastic modulus to nanoindentation hardness ratio, and high nanowear resistance. Nanoindentation hardness was positively correlated with the Raman peak ratio Id/Ig, whereas wear depth was negatively correlated with this ratio. These nanotribological properties highly depend on the films' nanostructures. The tribological properties of the FCVA-DLC films were also investigated using a ball-on-disk test. The average friction coefficient of DLC films deposited with DC bias voltage was lower than that of DLC films deposited with pulse bias voltage. The friction coefficient calculated from the ball-on-disk test was correlated with the nanoindentation hardness in dry conditions. However, under boundary lubrication conditions, the friction coefficient and specific wear rate had little correlation with nanoindentation hardness, and wear behavior seemed to be influenced by other factors such as adhesion strength between the film and substrate.