Efficient Physical Modeling of MEMS Energy Harvesting Devices With VHDL-AMS
Efficient Physical Modeling of MEMS Energy Harvesting Devices With VHDL-AMS
复制标题
使用 VHDL-AMS 对 MEMS 能量收集设备进行高效物理建模
作者：
H. Boussetta;M. Marzencki;S. Basrour;A. Soudani
在本文中，我们提出了一个微机电系统（MEMS）压电微发电机的物理模型的VHDL-AMS实现。这样的可执行模型充当规范和制造设备之间的桥梁。通常，系统的机电部件的物理和几何参数仅在设计流程的较低级别中被考虑，通常使用有限元工具，尽管它们的准确性，但不允许结构特性和尺寸的有效优化。因此，这将是非常有趣的，有一个模型的整个收获系统（MEMS压电微型发电机级联的电子电路），以执行有效的优化。MEMS的一些特性如阻尼效应和工艺波动对MEMS的性能有相当大的影响，特别是谐振结构。我们提出了一种方法，在设计流程的早期集成这些功能，同时保持合理的模拟时间。由此产生的模型是可重复使用的，预测（与实验结果相比），并尊重基尔霍夫定律。因此，它可以集成在全球仿真的多域和混合信号系统，如无线传感器节点。
In this paper, we propose a VHDL-AMS implementation of a physical model of a microelectromechanical systems (MEMS) piezoelectric microgenerator. Such an executable model acts as a bridge between specifications and fabricated devices. Usually, physical and geometrical parameters of electromechanical parts of a system are only considered in lower levels of the design flow, typically using finite-element tools, which, despite their accuracy, do not allow efficient optimization of the structure properties and dimensions. Thus, it would be very interesting to have a model of the entire harvesting system (the MEMS piezoelectric microgenerator cascaded with the electronic circuit) to perform efficient optimization. Some features like damping effects and process fluctuations have considerable impact on the performance of MEMS, especially the resonant structures. We propose a method of integrating such features early in the design flow, while keeping the simulation time reasonable. The resulting model is reusable, predictive (comparable to experimental results) and respects Kirchhoff laws. Consequently, it can be integrated in global simulation of multidomain and mixed signal systems like wireless sensor nodes.