Periodic arrays of structurally complex oxide nanoshells and their use as substrate-confined nanoreactors
Periodic arrays of structurally complex oxide nanoshells and their use as substrate-confined nanoreactors
复制标题
结构复杂的氧化物纳米壳的周期性阵列及其作为基底限制纳米反应器的用途
DOI：
10.1039/d3nr04345b
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发表时间：
2023
期刊：
影响因子：
6.7
通讯作者：
Neretina, Svetlana
中科院分区：
文献类型：
--
作者：
Tuff, Walker J.;Hughes, Robert A.;Nieukirk, Brendan D.;Ciambriello, Luca;Neal, Robert D.;Golze, Spencer D.;Gavioli, Luca;Neretina, Svetlana
牺牲模板提供了一种获得对纳米级反应产物的高水平控制的有效途径。原子层沉积 (ALD) 非常适合此类方法，因为它能够通过沉积超薄保形层来复制模板材料的表面形貌。在此，金属纳米结构被证明是形成结构复杂且确定性定位的氧化物纳米壳、开顶纳米碗、垂直站立的半壳和纳米环的牺牲模板。在这个三步过程中，金属纳米晶体形成周期性阵列，涂有 ALD 沉积的氧化物，并通过选择性蚀刻穿过氧化物壳中形成的纳米孔来挖空。通过使用定向离子束进一步增强了该过程，该离子束用于将氧化物壳雕刻成碗状和环状结构。如此形成的材料的功能通过它们作为能够促进纳米材料的生长和限制的基底限制纳米反应器的用途得到证明。总而言之，这项工作扩展了基于基底的纳米材料的设计空间，为推进功能表面和设备创建了一个平台，并从更广泛的角度推进了 ALD 在形成复杂纳米材料中的应用。
Sacrificial templates present an effective pathway for gaining high-level control over nanoscale reaction products. Atomic layer deposition (ALD) is ideally suited for such approaches due to its ability to replicate the surface topography of a template material through the deposition of an ultrathin conformal layer. Herein, metal nanostructures are demonstrated as sacrificial templates for the formation of architecturally complex and deterministically positioned oxide nanoshells, open-topped nanobowls, vertically standing half-shells, and nanorings. The three-step process sees metal nanocrystals formed in periodic arrays, coated with an ALD-deposited oxide, and hollowed out with a selective etch through nanopores formed in the oxide shell. The procedure is further augmented through the use of a directional ion beam that is used to sculpt the oxide shells into bowl- and ring-like configurations. The functionality of the so-formed materials is demonstrated through their use as substrate-confined nanoreactors able to promote the growth and confinement of nanomaterials. Taken together, the work expands the design space for substrate-based nanomaterials, creates a platform for advancing functional surfaces and devices and, from a broader perspective, advances the use of ALD in forming complex nanomaterials.