Study on Defects in Ultrananocrystalline Diamond/Amorphous Carbon Composite Films Prepared by Physical Vapor Deposition
Study on Defects in Ultrananocrystalline Diamond/Amorphous Carbon Composite Films Prepared by Physical Vapor Deposition
复制标题
物理气相沉积法制备超纳米晶金刚石/非晶碳复合薄膜的缺陷研究
DOI：
10.1149/07525.0045ecst
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发表时间：
2017
期刊：
影响因子：
--
通讯作者：
and T. Yoshitake
中科院分区：
文献类型：
--
作者：
Y. Katamune;S. Al-Riyami;S. Takeichi;and T. Yoshitake
以石墨靶为靶材，采用同轴电弧等离子体沉积方法制备了超纳米晶金刚石/非晶碳复合材料(UNCd/Ac：H)薄膜。由于Ac：H和晶界的无序结构，物理气相沉积制备的UNCd/Ac：H薄膜在3~5 eV的光子范围内表现出较大的光吸收系数。电子自旋共振测量表明，存在大量的悬挂键，其密度约为10 2 2 cm−3。这些悬挂键可能导致金刚石带隙中局域态的形成，从而导致了UNCd/Ac：H薄膜特有的光学吸收性质。
Ultrananocrystalline diamond/amorphous carbon composite (UNCD/aC: H) films was deposited by coaxial arc plasma deposition with a graphite target. UNCD/aC: H films prepared by physical vapor deposition show large optical absorption coefficients in the photon range from 3 to 5 eV due to disordered structures in aC: H and grain boundaries. Electron spin resonance measurement indicates the existence of a large number of dangling bonds with a density of~ 10 22 cm− 3. These dangling bonds might cause the formation of localized states in diamond band gap and contribute to the optical absorption properties specific to the UNCD/aC: H films.