Photosensitive Poly(benzoxazole) Based on Poly(o-hydroxy amide), Dissolution Inhibitor, Thermoacid Generator, and Photoacid Generator
Photosensitive Poly(benzoxazole) Based on Poly(o-hydroxy amide), Dissolution Inhibitor, Thermoacid Generator, and Photoacid Generator
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DOI：
10.1295/polymj.pj2006174
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发表时间：
2007-03
期刊：
影响因子：
2.8
通讯作者：
Tomohito Ogura;K. Yamaguchi;Y. Shibasaki;M. Ueda
中科院分区：
文献类型：
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作者：
Tomohito Ogura;K. Yamaguchi;Y. Shibasaki;M. Ueda
一种基于聚（邻羟基酰胺）（PHA）的正型光敏聚苯并恶唑（PSPBO），溶解抑制剂（DI）9,9-双（4-叔丁氧基羰氧基苯基）芴（t-BocBHF），热酸产生剂（TAG）对甲苯磺酸异丙酯（ITS）和 已开发出光产酸剂（PAG）（5-丙基磺酰氧基亚氨基-5H-噻吩-2-亚基）-（2-甲基苯基）乙腈（PTMA）。 ITS很容易通过对甲苯磺酰氯与异丙醇反应制备。研究了 PSPBO 体系的溶解行为与 PTMA 负载量以及曝光后烘烤 (PEB) 温度和时间的关系。由 PHA (73 wt%)、t-BocBHF (18 wt%)、ITS (7.5 wt%) 和 PTMA (1.5 wt%) 组成的 PSPBO 在暴露于 365 nm 光（i-line）并使用水性碱性显影剂（2.38 wt% 四甲基铵）显影时表现出 33 mJ/cm2 的灵敏度和 5.1 的对比度 氢氧化物溶液 (TMAHaq)/2.5 wt% 异丙醇 (i-PrOH)。通过接触印刷产生具有 3 μm 特征的清晰正像，并在 250 °C 加热 20 分钟后转化为聚苯并恶唑 (PBO) 图案。因此，ITS作为TAG可以有效地提高PHA的敏感性和低温环化成PBO的能力，并满足工业上的实际要求。
A positive-type photosensitive polybenzoxazole (PSPBO) based on a poly(o-hydroxy amide) (PHA), a dissolution inhibitor (DI) 9,9-bis(4-tert-butoxycarbonyloxyphenyl)fluorene (t-BocBHF), a thermoacid generator (TAG) isopropyl p-toluenesufonate (ITS), and a photoacid generator (PAG) (5-propylsulfonyloxyimino-5H-thiophene-2-ylidene)-(2-methylphenyl)acetonitrile (PTMA) has been developed. ITS was easily prepared by reaction of p-toluenesulfonyl chloride with isopropyl alcohol. The dissolution behavior of the PSPBO system was studied in relation to PTMA loadings, and post exposure baking (PEB) temperature and time. The PSPBO consisting of PHA (73 wt %), t-BocBHF (18 wt %), ITS (7.5 wt %), and PTMA (1.5 wt %) exhibited a sensitivity of 33 mJ/cm2 and a contrast of 5.1 when exposed to 365 nm light (i-line) and developed with an aqueous alkaline developer, 2.38 wt % tetramethylammonium hydroxide solution (TMAHaq)/2.5 wt % iso-propanol (i-PrOH). A clear positive image with 3 μm features was produced by contact-printing and converted into a poly(benzoxazole) (PBO) pattern upon heating at 250 °C for 20 min. Thus, the ITS is effective as a TAG for improving the sensitivity and low temperature cyclization of PHA into the PBO as well to meet practical requirement in the industry.