MoS2 negative-capacitance transistors with steep slope and negligible hysteresis by using monolayer Al1-xZrxOy as gate dielectric plus NH3-plasma treatment

MoS2 negative-capacitance transistors with steep slope and negligible hysteresis by using monolayer Al1-xZrxOy as gate dielectric plus NH3-plasma treatment
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DOI:
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发表时间:
2022
期刊:
Applied Surface Science
影响因子:
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通讯作者:
Jingping Xu
Jingping Xu
中科院分区:
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文献类型:
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作者:
Xingjuan Song;Lu Liu;Jingping Xu

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