Facile In-Tube-Center Packaging of Flexible Airflow Rate Microsensor for Simultaneous Respiration and Heartbeat Measurement
Facile In-Tube-Center Packaging of Flexible Airflow Rate Microsensor for Simultaneous Respiration and Heartbeat Measurement
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DOI：
10.1109/jsen.2023.3272310
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发表时间：
2023-06-15
影响因子：
4.3
通讯作者：
Shikida，Mitsuhiro
中科院分区：
文献类型：
--
作者：
Al Farisi，Muhammad Salman;Wang，Yang;Shikida，Mitsuhiro
呼吸和心跳是生物重要的生命体征之一。利用肺和心脏的物理连接，可以使用气流速率微传感器同时测量呼吸气流。对于这样的气流速率传感器，封装对于定义和封装气流区域至关重要。在这项研究中，我们提出了一种柔性气流速率微传感器的简易封装技术。采用标准微加工技术在聚酰亚胺（PI）薄膜上制备了热量感测结构。薄膜被包装在树脂管的中心利用其屈曲。我们还提出了一种改善时间响应的方法，通过在较厚的薄膜支撑的传感结构上实现薄衬底来限制传感结构周围的热容量。该策略成功地提高了气流速率传感器的时间响应和灵敏度。最后，通过小动物即大鼠的动物实验，证明了传感器在呼吸和心跳同步测量中的应用。
Respiration and heartbeat are among the important vital signs of living beings. Taking advantage of the physical attachment of the lung and heart, measurements of both can be performed simultaneously using airflow rate microsensors to measure the respiration airflow. For such airflow rate sensors, the packaging is crucial to define and encapsulate the airflow region. In this study, we propose a facile packaging technique for flexible airflow rate microsensors. The thermal calorimetric sensing structure was fabricated through a standard microfabrication technology on a thin polyimide (PI) film. The film was packaged at the center of a resin tube utilizing its buckling. We also proposed an approach to improve the time response by limiting the thermal capacity around the sensing structure through the implementation of a thin substrate for the sensing structure supported by a thicker film. The strategy successfully improved both the time response and sensitivity of the airflow rate sensor. Finally, the utilization of the sensor for simultaneous respiration and heartbeat measurement was demonstrated through an animal experiment using a small animal, namely rats.