Nanostructured deposition of nanoparticles from the gas phase
Nanostructured deposition of nanoparticles from the gas phase
复制标题
气相纳米颗粒的纳米结构沉积
DOI：
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发表时间：
2002
期刊：
影响因子：
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通讯作者：
H. Fissan
中科院分区：
文献类型：
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作者：
T. Krinke;K. Deppert;M. Magnusson;H. Fissan
对于许多应用来说，气相纳米颗粒因其物理性质而备受关注。特别是对于电子学或光电子学的应用，将其从随机分布的气相转移到平板上。必须控制衬底表面，因为在衬底上精确定义的区域中需要颗粒。我们展示了一种平行的过程，用于在氧化的硅表面转移电荷图案，然后沉积单分散的单电荷纳米颗粒，这允许创建从100 nm分辨率到上部微米范围的结构的颗粒排列。使用覆盖有金属层的聚二甲基硅氧烷(PDMS)印章转移电荷图案。通过在印章上施加不同的电压，可以转移负电荷或正电荷。因此，不同极性的纳米颗粒可以被引导到特定的地方。(更少)
For many applications, nanoparticles from the gas phase are of interest due to their physical properties. Especially for electronic or optoelectronic applications, the transfer from their random distribution in the gas phase onto flat. substrate surfaces has to be controlled because the particles are needed in exactly defined areas on the substrate. We demonstrate a parallel process for the transfer of charge patterns on oxidized silicon surfaces followed by the deposition of mono-disperse singly charged nanoparticles, which allows the creation of particle arrangements reaching from 100 nm resolution up to structures in the upper micrometer range. The charge patterns are transferred using a polydimethylsiloxane (PDMS) stamp, which is covered with a metal layer. By applying different voltages to the stamp, negative or positive charges can be transferred. Thus, nanoparticles of different polarities can be guided to certain places. (Less)