Scanning probe arrays for life sciences and nanobiology applications
Scanning probe arrays for life sciences and nanobiology applications
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DOI：
10.1016/j.mee.2006.01.201
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发表时间：
2006-04-01
影响因子：
2.3
通讯作者：
Vettiger, P
中科院分区：
文献类型：
--
作者：
Aeschimann, L;Meister, A;Vettiger, P
鉴于纳米生物学和生命科学的应用，各种集成压阻式传感器的一维和二维扫描探针阵列已经被开发出来。对于这种应用，实验通常在液体条件下进行。探针阵列采用硅微加工技术和SOI晶圆制备。对于生物应用，当悬臂浸入导电缓冲环境时，必须保护压阻式传感元件。为此，传感器被涂上了一层50纳米厚的氮化硅薄膜。所实现的压阻式悬臂梁具有0.1至0.5 N/m之间的低弹簧常数，非常适合生物应用。通过在缓冲溶液中同时成像测试样品，证明了使用1 × 2探针阵列的平行成像。(c) 2006 Elsevier B.V.版权所有
Various 1D and 2D scanning probe arrays with integrated piezoresistive sensors have been developed in view of nanobiology and life science applications. For such applications, the experiments Deed usually to be performed under liquid conditions. The probe arrays have been fabricated by using silicon micromachining techniques and SOI wafers. For biological applications, when the cantilevers are immersed in electrically conductive buffer environments, the piezoresistive sensing elements have to be protected. For this purpose, the sensors were coated with a 50 nm thick silicon nitride film. The realized piezoresistive cantilevers had low spring constants between 0.1 and 0.5 N/m, well suited for biological applications. Parallel imaging using a 1 x 2 probe array was demonstrated by simultaneous imaging of a test sample in buffer solution. (c) 2006 Elsevier B.V. All rights reserved.