Calibration and standards beamline 6.3.2 at the Advanced Light Source
Calibration and standards beamline 6.3.2 at the Advanced Light Source
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高级光源处的校准和标准光束线 6.3.2
DOI：
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发表时间：
1996
期刊：
影响因子：
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通讯作者：
W. Steele
中科院分区：
文献类型：
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作者：
J. Underwood;E. Gullikson;M. Koike;P. Batson;P. Denham;K. Franck;R. Tackaberry;W. Steele
这条偏转磁铁光束线自1995年2月以来一直在运行，用于光学元件（反射镜、光栅、多层膜、探测器等）的表征。能量范围为50-1000 eV。虽然它主要是为EUV投影光刻的多层反射光学器件的精密反射测量而设计的，但它具有广泛的测量能力。光学系统由单色仪、反射计和重聚焦镜组成，以在样品上提供小光斑。单色器是一种非常紧凑的、无入口狭缝的、可变线间距的平面光栅设计，其中机械刻划光栅在高度缩小的球面镜的会聚光中工作。反射镜的像差通过线间距变化来校正，使得光谱分辨率λ/Δλ被ALS源尺寸限制为约7000。波长扫描是通过简单的旋转光栅与一个固定的出口狭缝。该反射计具有定位的能力，...
This bending magnet beamline has been in operation since February 1995 for the characterization of optical elements (mirrors, gratings, multilayers, detectors, etc.) in the energy range 50–1000 eV. Although it was designed primarily for precision reflectometry of multilayer reflecting optics for EUV projection lithography, it has capabilities for a wide range of measurements. The optics consist of a monochromator, a reflectometer, and refocusing mirrors to provide a small spot on the sample. The monochromator is a very compact, entrance‐slitless, varied‐line‐spacing plane‐grating design in which the mechanically ruled grating operates in the converging light from a spherical mirror working at high demagnification. Aberrations of the mirror are corrected by the line spacing variation, so that the spectral resolving power λ/Δλ is limited by the ALS source size to about 7000. Wavelength is scanned by simple rotation of the grating with a fixed exit slit. The reflectometer has the capability of positioning th...