The use of environmental scanning electron microscopy for imaging wet and insulating materials
The use of environmental scanning electron microscopy for imaging wet and insulating materials
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DOI：
10.1038/nmat898
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发表时间：
2003-08-01
期刊：
影响因子：
41.2
通讯作者：
Donald, AM
中科院分区：
文献类型：
--
作者：
Donald, AM
环境扫描电子显微镜（ESEM）是传统SEM的直接后代，但也允许潮湿和绝缘样品进行成像，而无需事先准备样品。样品周围可以容纳低压（高达约10埃）的气体。当这种气体是水时，水合样品可以保持在其天然状态。无论气体是水还是其他气体，在从样品发射的电子与气体分子之间的碰撞中形成的离子都朝向样品表面漂移回来，有助于减少电荷积聚。这消除了对绝缘体进行导电表面涂层的需要。ESEM的这两个关键优势为扫描电子显微镜的强大功能开辟了广泛的材料。
The environmental scanning electron microscope (ESEM) is a direct descendant of the conventional SEM, but also permits wet and insulating samples to be imaged without prior specimen preparation. A low pressure (up to around 10 torr) of a gas can be accommodated around the sample. When this gas is water, hydrated samples can be maintained in their native state. Whether the gas is water or some other gas, ions formed on collisions between electrons emitted from the sample and the gaseous molecules drift back towards the sample surface helping to reduce charge build up. This eliminates the need for insulators to be subjected to a conductive surface coating. These two key advantages of ESEM open up a wide range of materials to the power of scanning electron microscopy.