Layout decomposition with pairwise coloring for multiple patterning lithography
Layout decomposition with pairwise coloring for multiple patterning lithography
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DOI：
10.1109/iccad.2013.6691115
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发表时间：
2013-11
期刊：
影响因子：
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通讯作者：
Ye Zhang;W. Luk;H. Zhou;Changhao Yan;Xuan Zeng
中科院分区：
文献类型：
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作者：
Ye Zhang;W. Luk;H. Zhou;Changhao Yan;Xuan Zeng
虽然双模光刻技术仍处于积极发展阶段，但三模甚至四模光刻技术最近被提出作为下一个技术节点。本文提出了一种双着色（PWC）方法来解决一般多重图案光刻（MPL）的版面分解问题。其主要思想是将问题简化为并发双着色问题的集合。通过对每个通道的颜色集对应用双着色方法，迭代地改进了整个解决方案。这种方法的一个明显优点是可以无缝地重用现有的DPL技术。它们的任何改进都可以直接使MPL对应方受益。此外，我们观察到，在spqr -树图划分方法的帮助下，每个通道都可以在接近线性的时间内完成。此外，为了防止解陷入局部极小值，还采用了随机化初始化策略。PWC方法以不同的随机初始解执行一定次数，从中选出最优解作为输出。我们已经实现了我们的方法，用于特殊的三重图案光刻（TPL）。实验结果表明，与最近发表的两种TPL算法相比，本文方法的冲突数分别减少了33.2%和44.9%。
While double patterning lithography (DPL) is still in active development, triple or even quadruple patterning has recently been proposed for the next technology node. In this paper, we propose a pairwise coloring (PWC) method to tackle the layout decomposition problem for general multiple patterning lithography (MPL). The main idea is to reduce the problem to sets of concurrent bi-coloring problems. The overall solution is refined iteratively by applying a bi-coloring method for pairs of color sets per pass. One obvious advantage of this approach is that the existing DPL techniques can be reused seamlessly. Any improvement of them can directly benefit to the MPL counterpart. Moreover, we observe that with the help of the SPQR-tree graph division method, each pass can be fulfilled in nearly linear time. In addition, to prevent the solution getting stuck in the local minima, a randomized initialization strategy is incorporated. The PWC method is executed certain number of times with different randomized initial solutions, out of which the best solution is selected as output. We have implemented our method for particular triple patterning lithography (TPL). The experimental results show that compared with two recently published methods for TPL, our method can reduce the number of conflicts up to 33.2% and 44.9% respectively.