A fiber-optic hydrogen gas sensor with low propagation loss
A fiber-optic hydrogen gas sensor with low propagation loss
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DOI：
10.1016/j.snb.2010.01.040
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发表时间：
2010-03-19
影响因子：
8.4
通讯作者：
Fukuda, K.
中科院分区：
文献类型：
--
作者：
Watanabe, T.;Okazaki, S.;Fukuda, K.
研制了一种光纤氢气传感器，其包层区构成气体敏感区。为了气体泄漏监测的目的，具有较宽感测区域的感测装置是非常期望的。所报道的传感器具有潜在的检测氢气泄漏的任何位置沿传感光纤沿着。传感原理是基于由三氧化钨（WO 3）和铂（Pt）层组成的包层区域中的倏逝波相互作用的吸收。这种双层薄膜是通过电子束（EB）沉积方法制备的。将WO 3层直接沉积在石英玻璃纤维芯上，然后将Pt层沉积在WO 3层的顶部。氢原子很容易嵌入到WO 3中，导致透明的WO 3薄膜转变为蓝色钨青铜。这种颜色变化导致光纤传播损耗的增加。Pt层充当催化剂以刺激反应。合适的传感层厚度对理想的操作至关重要。更厚的WO 3层导致更高的灵敏度，牺牲了传播损耗的增加。损耗增加限制了实际感测长度。WO 3催化剂的最佳厚度为50 nm，Pt催化剂的最佳厚度为5 nm。该传感器器件的传播损耗低于溶胶-凝胶（SG）法，这是以前开发的设备制造。该方法响应速度快、重现性好。EB沉积方法对于控制传感器装置的光学性质是有效的，并且对于实现分布式传感器装置是非常有前途的技术。(C)2010 Elsevier B. V.保留所有权利。
An optical fiber hydrogen gas sensor, whose clad region constitutes a gas sensing area, was developed. For gas leakage monitoring purposes, sensing devices with wider sensing region are highly desirable. The reported sensor has potential to detect the hydrogen leakage anywhere along the sensing fiber. The sensing principle was based on the absorption of the evanescent-wave interaction in the clad region composed of tungsten trioxide (WO3) and platinum (Pt) layer. This two-layered thin film was fabricated by electron beam (EB) deposition method. The WO3 layer was directly deposited on the quartz glass fiber core, and the Pt layer was deposited on top of the WO3 layer afterward. Hydrogen atoms are easily intercalated into WO3 causing the semitransparent WO3 film to be transformed to blue tungsten bronze. This color change resulted in increase of optical fiber propagation loss. The Pt layer serves as catalyst to stimulate the reaction. Proper thickness of the sensing layer was crucial to the ideal operation. Thicker WO3 layer results in higher sensitivity, with the sacrifice of the increase in propagation loss. The loss increase limits the practical sensing length. The optimal thickness of WO3 layer was determined to be 50 nm, whereas that of Pt catalyst was 5 nm. The propagation loss of this sensor device was lower than that of the device fabricated by sol-gel (SG) method, which was previously developed. The fast response speed and good reproducibility were also observed. The EB deposition method was effective to control optical properties of the sensor device with ease and highly promising technology for realizing distributed sensor devices. (C) 2010 Elsevier B.V. All rights reserved.