Solving the inverse grating problem by white light interference Fourier scatterometry
Solving the inverse grating problem by white light interference Fourier scatterometry
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DOI：
10.1038/lsa.2012.36
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发表时间：
2012-11-01
影响因子：
19.4
通讯作者：
Osten, Wolfgang
中科院分区：
文献类型：
--
作者：
Paz, Valeriano Ferreras;Peterhaensel, Sandy;Osten, Wolfgang
散射测量法是一种成熟、快速、精确的光学测量方法，用于表征次λ周期特征。傅里叶散射测量法通过分析傅里叶平面，使不需要任何机械扫描就可以收集角度分辨的衍射光谱成为可能。为了提高该方法的深度灵敏度，我们将其与白光干涉法相结合。我们展示了该方法在硅线光栅上的示例应用。为了表征光栅结构的亚λ特征，我们通过比较模拟光谱和测量光谱，应用基于模型的重建方法。所有的模拟都是基于严格的耦合波分析方法。
Scatterometry is a well-established, fast and precise optical metrology method used for the characterization of sub-lambda periodic features. The Fourier scatterometry method, by analyzing the Fourier plane, makes it possible to collect the angle-resolved diffraction spectrum without any mechanical scanning. To improve the depth sensitivity of this method, we combine it with white light interferometry. We show the exemplary application of the method on a silicon line grating. To characterize the sub-lambda features of the grating structures, we apply a model-based reconstruction approach by comparing simulated and measured spectra. All simulations are based on the rigorous coupled-wave analysis method.