Lattice expansion in nanocrystalline niobium thin films
Lattice expansion in nanocrystalline niobium thin films
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DOI：
10.1063/1.1582361
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发表时间：
2003-06-16
影响因子：
4
通讯作者：
Ayyub, P
中科院分区：
文献类型：
--
作者：
Banerjee, R;Sperling, EA;Ayyub, P
采用高压磁控溅射法制备了高纯纳米晶铌（Nb）薄膜。在沉积期间增加溅射气体的压力已经系统地导致这些膜中的微晶尺寸减小。基于X射线和电子衍射的结果，它是观察到的纳米晶Nb膜表现出显着大的晶格膨胀与晶粒尺寸的减少。然而，当微晶尺寸减小到5nm以下时，bcc晶体结构没有变化。采用最近提出的基于线性弹性的模型，并通过适当修改它，将晶粒尺寸依赖的晶界宽度的晶格膨胀在纳米晶Nb已被模拟。(C)2003年，美国物理学会。
High-purity nanocrystalline niobium (Nb) thin films have been deposited using high-pressure magnetron sputter deposition. Increasing the pressure of the sputtering gas during deposition has systematically led to reduced crystallite sizes in these films. Based on x-ray and electron diffraction results, it is observed that the nanocrystalline Nb films exhibit a significantly large lattice expansion with reduction in crystallite size. There is however, no change in the bcc crystal structure on reduction in crystallite size to below 5 nm. The lattice expansion in nanocrystalline Nb has been simulated by employing a recently proposed model based on linear elasticity and by appropriately modifying it to incorporate a crystallite-size-dependent width of the grain boundary. (C) 2003 American Institute of Physics.