Flexible all-inorganic Sm-doped PMN-PT film with ultrahigh piezoelectric coefficient for mechanical energy harvesting, motion sensing, and human-machine interaction
Flexible all-inorganic Sm-doped PMN-PT film with ultrahigh piezoelectric coefficient for mechanical energy harvesting, motion sensing, and human-machine interaction
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DOI：
10.1016/j.nanoen.2022.107182
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发表时间：
2022-04-04
期刊：
影响因子：
17.6
通讯作者：
Cheng, Zhenxiang
中科院分区：
文献类型：
--
作者：
Lv, Panpan;Qian, Jin;Cheng, Zhenxiang
在人工智能和物联网时代，柔性MICAtronics（一种由层状云石上的范德华外延制成的异质结构材料）的出现，由于在柔性铁电存储器、介电电容器等领域的应用而引起了极大的研究兴趣，但用于能量收集器和传感器的柔性压电无机薄膜的实现却很少。在这项工作中，通过简单的一步溶胶-凝胶工艺，成功地在云母衬底上生长了一种全无机透明的Sm掺杂Pb(Mg1/3Nb2/(3))O-3-PbTiO3 （Sm:PMN-PT）薄膜。由于局部结构非均质性增强和衬底夹紧效应减弱，柔性薄膜的压电系数d（33）高达380 pm V-1。同时，在不牺牲其电气性能的情况下实现了优越的灵活性，这体现在承受2毫米的小曲率半径甚至10(3)次机械弯曲循环。利用该Sm:PMN-PT薄膜制备的器件具有优异的能量收集性能，输出电压为6 V，电流密度为150 μ A cm(-2)，力灵敏度为5.86 V N-1。此外，它还具有一定的耐温性和良好的疏水性。在实际应用中，它不仅可以监测身体的动作，包括手指按压，手敲击，脚踩，手指/手腕弯曲，手抓握，还可以作为触觉传感器，记录手指的触摸，解锁智能手机。该研究表明，基于云母基底的柔性PMN-PT薄膜在机械能收集、运动传感和人机交互方面具有充分的应用潜力。
In the era of artificial intelligence and the internet of things, the emergence of flexible MICAtronics, hetero-structures made by van der Waals epitaxy on layered mica, has attracted great research interest due to applications in the fields of flexible ferroelectric memory, dielectric capacitors, and others, but less effort has been dedicated to the realization of flexible piezoelectric inorganic films for energy harvesters and sensors. In this work, an all-inorganic transparent Sm-doped Pb(Mg1/3Nb2/(3))O-3-PbTiO3 (Sm:PMN-PT) film has been successfully grown on Mica substrate via a simple one-step sol-gel process. The flexible film shows an ultrahigh piezoelectric coefficient d(33) of 380 pm V-1 owing to the enhanced local structural heterogeneity and the weak substrate clamping effect. Simultaneously, superior flexibility is realized without sacrificing its electrical performance, as reflected by withstanding a small radius of curvature of 2 mm and even 10(3) mechanical bending cycles. Utilizing this Sm:PMN-PT film, the fabricated device exhibits an excellent energy harvesting performance with output voltage of 6 V, current density of 150 mu A cm(-2), andultrahigh force sensitivity of 5.86 V N-1. Besides, it also possesses a certain temperature resistance and favorable hydrophobicity. In practical applications, it can not only be employed to monitor body motions, including finger pressing, hand tapping, foot stepping, finger/wrist bending, and hand grasping, but also serves as a tactile sensor to record the touch of a finger to unlock a smartphone. This work demonstrates that the flexible PMN-PT based film on Mica substrate has full application potential in mechanical energy harvesting, motion sensing, and human-machine interaction.