Enhanced infra-red emission from sub-millimeter microelectromechanical systems micro hotplates via inkjet deposited carbon nanoparticles and fullerenes
Enhanced infra-red emission from sub-millimeter microelectromechanical systems micro hotplates via inkjet deposited carbon nanoparticles and fullerenes
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DOI：
10.1063/1.4809546
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发表时间：
2013-06
影响因子：
3.2
通讯作者：
A. Luca;M. Cole;A. Fasoli;S. Z. Ali;F. Udrea;W. Milne
中科院分区：
文献类型：
--
作者：
A. Luca;M. Cole;A. Fasoli;S. Z. Ali;F. Udrea;W. Milne
在本文中，我们展示了一种微喷墨印刷技术作为一个可重复的后处理的碳纳米颗粒和富勒烯adlayers到完全CMOS兼容的微机电绝缘体上硅红外（IR）光源，以提高其红外发射的沉积。我们的实验表明，涂层发射器的红外发射效率显着增加。我们用模型对这些发现进行了数值验证，这些模型表明波长<5.5 μm时的主要性能增加。在这里，碳纳米颗粒的直径的双峰尺寸分布，相对于富勒烯，是一个有效的介体朝向拓扑增强的发射率，我们的pellised发射器。已经显示出IR发射功率密度的90%的改善，我们已经合理化了沉积的碳纳米颗粒吸附层的平均厚度的增加。
In this paper, we demonstrate a micro-inkjet printing technique as a reproducible post-process for the deposition of carbon nanoparticles and fullerene adlayers onto fully CMOS compatible micro-electro-mechanical silicon-on-insulator infrared (IR) light sources to enhance their infrared emission. We show experimentally a significant increase in the infrared emission efficiency of the coated emitters. We numerically validate these findings with models suggesting a dominant performance increase for wavelengths <5.5 μm. Here, the bimodal size distribution in the diameter of the carbon nanoparticles, relative to the fullerenes, is an effective mediator towards topologically enhanced emittance of our miniaturised emitters. A 90% improvement in IR emission power density has been shown which we have rationalised with an increase in the mean thickness of the deposited carbon nanoparticle adlayer.