Role of Helicon Waves on High-Density Plasma Production
Role of Helicon Waves on High-Density Plasma Production
复制标题
螺旋波在高密度等离子体产生中的作用
DOI：
10.1143/jjap.33.5950
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发表时间：
1994
影响因子：
1.5
通讯作者：
Y. Hara
中科院分区：
文献类型：
--
作者：
Y. Yasaka;Y. Hara
通过使用旋转场天线研究螺旋波频率范围内射频场的等离子体产生，该天线可以选择所施加射频的方位模数。计算的色散关系表明，m=-1模螺旋波传播，而m=+1模螺旋波被截止。在 m = -1 模式射频应用情况下产生的氦等离子体密度为 1 ×1013 cm-3，比 m = +1 模式射频应用情况大 5 倍以上。射频等离子体产生的二维数值模拟也定性地给出了与实验相同的结果。 m = +1 模式射频的等离子体由天线近场维持，而对于 m = -1 模式射频，等离子体由传播的螺旋波的功率吸收维持。从实验和模拟来看，螺旋波通过对电子的有效功率沉积将等离子体密度从 1012 cm-3 增加到 1013 cm-3。
Plasma production by rf fields in the helicon wave frequency range is investigated by using the rotating field antenna which can select the azimuthal mode number of the applied rf. The calculated dispersion relation shows that the m = -1 mode helicon wave propagates whereas the m =+1 mode helicon wave is cut off. The produced helium plasma density in the case of the m = -1 mode rf application is 1 ×1013 cm-3, which is more than 5 times greater than in the case of the m = +1 mode rf application. The two-dimensional numerical simulation of the rf plasma production also qualitatively gives the same result as in the experiment. The plasma for the m = +1 mode rf is sustained by the antenna near field, while for the m = -1 mode rf, it is sustained by the power absorption from the propagating helicon wave. From both the experiment and the simulation, the helicon wave is revealed to increase the plasma density from the order of 1012 cm-3 to 1013 cm-3 by efficient power deposition to electrons.