Micro-imaging system using scanning DC-SQUID microscope
Micro-imaging system using scanning DC-SQUID microscope
复制标题
使用扫描 DC-SQUID 显微镜的显微成像系统
DOI：
10.1109/77.783782
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发表时间：
1999
影响因子：
1.8
通讯作者：
K. Chinone
中科院分区：
文献类型：
--
作者：
T. Morooka;S. Nakayama;A. Odawara;M. Ikeda;S. Tanaka;K. Chinone
研制了一种低温微成像系统，用于超导膜、磁膜的研究和超导集成电路的检测。该系统由微型DC-SQUID、低温恒温器、精密扫描级和计算机组成。设计了两种不同类型的微型dc - squid。一种是磁力计（Bz），带有直径为10 /spl mu/m的单匝拾取线圈；另一种是梯度计（dBz/dx），带有平面一阶导数拾取线圈。每个微型DC-SQUID采用薄Nb薄膜制造技术集成在3mm / sp1倍/ 3mm的Si芯片上。利用该系统进行了初步实验，获得了多幅磁图像。我们用迈斯纳筛选法和薄石榴石(（YBi)/ sub3 /(FeAl)/ sub5 /O/ sub12 /）薄膜的磁畴观察了薄超导铌薄膜的图案。
A micro-imaging system in a low temperature environment has been developed for the study of superconducting films and magnetic films and for the inspection of superconducting integrated circuits. The system consists of a micro DC-SQUID, a cryostat, a precise scanning stage, and a computer. Two different types of micro DC-SQUIDs were designed. One was a magnetometer (Bz) with a one-turn pick-up coil with a diameter of 10 /spl mu/m, and the other was a gradiometer (dBz/dx) with a planar first-order derivative pick-up coil. Each micro DC-SQUID was integrated on a 3 mm /spl times/3 mm Si chip using thin Nb film fabrication technology. Preliminary experiments were made using the system and several magnetic images were obtained. We present observations of a thin superconducting Nb film pattern by applying the Meissner screening and the magnetic domains of a thin garnet ((YBi)/sub 3/(FeAl)/sub 5/O/sub 12/) film.