Investigation of the Growth Behaviour of Cobalt Thin Films from Chemical Vapour Deposition, Using Directly Coupled X-ray Photoelectron Spectroscopy
Investigation of the Growth Behaviour of Cobalt Thin Films from Chemical Vapour Deposition, Using Directly Coupled X-ray Photoelectron Spectroscopy
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使用直接耦合 X 射线光电子能谱研究化学气相沉积钴薄膜的生长行为
DOI:
10.1515/zpch-2015-0602
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发表时间:
1905
期刊:
影响因子:
--
通讯作者:
M. Bäumer
中科院分区:
文献类型:
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作者:
P.H. Tchoua Ngamou;A. El Kasmi;Th. Weiss;H. Vieker;A. Beyer;V. Zielasek;K. Kohse-Höinghaus;M. Bäumer