Characteristic Change Due to Polarization Fatigue of Sol-Gel Ferroelectric Pb(Zr0.4Ti0.6)O3 Thin-Film Capacitors
Characteristic Change Due to Polarization Fatigue of Sol-Gel Ferroelectric Pb(Zr0.4Ti0.6)O3 Thin-Film Capacitors
复制标题
溶胶-凝胶铁电Pb(Zr0.4Ti0.6)O3薄膜电容器极化疲劳引起的特性变化
DOI：
10.1143/jjap.33.5281
复制
发表时间：
1994
影响因子：
1.5
通讯作者：
Hitoshi Watanabe Paz de Araujo
中科院分区：
文献类型：
--
作者：
T. Mihara;Hitoshi Watanabe Paz de Araujo
通过测量电滞回线、零时间电流电压特性和极化切换后的介电常数，研究了溶胶-凝胶铁电Pb（Zr0.4Ti0.6）O3（PZT）薄膜电容器的疲劳特性。所有的评估进行了一定的开关周期在缓慢疲劳阶段，对数疲劳阶段和饱和阶段的样品。通过观察俄歇电子能谱（AES）深度分布发现，疲劳后在顶部和底部电极的界面处形成缺氧区域。时间零点的电流-电压（I-V）特性表明，欧姆泄漏电流增加的开关周期增加疲劳期间。这表明在疲劳过程中产生的氧空位作为施主可以补偿作为受主的铅空位。Pr ~+-Pr ~-的电场依赖性和介电常数的依赖性表明，畴的运动，它可以在矫顽场附近的电场中移动，疲劳后被抑制。我们认为氧空位抑制了畴运动，导致了极化退化。由于超过150 kV/cm的偏置介电常数在疲劳后没有显示出显著变化，因此似乎在疲劳期间没有产生与电极相邻的低介电常数区域。
We studied the fatigue characteristics of sol-gel ferroelectric Pb(Zr0.4Ti0.6)O3 (PZT) thin-film capacitors measuring hysteresis loops, time-zero current voltage characteristics and the dielectric constant after polarization switching. All evaluations were carried out on samples with certain switching cycles at the slow fatigue stage, logarithmic fatigue stage and saturated stage. Oxygen-deficient regions at the interfaces at both the top and bottom electrodes were formed after fatigue, as found by observing Auger electron spectroscopy (AES) depth profiles. Time-zero current-voltage (I-V) characteristics show that ohmic leakage current increased as the switching cycles increased during fatigue. This indicates that oxygen vacancies as donors arising during fatigue may compensate the lead vacancies as acceptors. The electric field dependence of Pr+-Pr- and that of the dielectric constant show that the motion of domains, which can move in the electric field near a coercive field, is suppressed after fatigue. We conclude that the oxygen vacancies suppress the domain motion and cause remanent polarization degradation. Since the biased-dielectric constant beyond 150 kV/cm showed no significant change after fatigue, it seems that no low-dielectric-constant regions adjacent to the electrode were generated during fatigue.