Parameter extraction for a Ti/4H-SiC Schottky diode

Parameter extraction for a Ti/4H-SiC Schottky diode
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DOI:
10.1088/1009-1963/12/1/317
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发表时间:
2003-01
期刊:
Chinese Physics
影响因子:
--
通讯作者:
Shou-Guo Wang;Yimen Zhang;Yu-Ming Zhang
Shou-Guo Wang;Yimen Zhang;Yu-Ming Zhang
中科院分区:
其他
文献类型:
--
作者:
Shou-Guo Wang;Yimen Zhang;Yu-Ming Zhang

文献摘要

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在MIS模型的基础上,提出了一种利用SiC肖特基二极管的I-V特性提取其参数的简单方法。据我们所知,首次提取了界面氧化物电容Ci。本文制作的4 H-SiC肖特基二极管的测试参数为:理想因子n、串联电阻Rs、零场势垒高度<$B0、界面态密度Dit、界面氧化层电容Ci和界面态中性能级<$0。
Based on the MIS model, a simple method to extract parameters of SiC Schottky diodes is presented using the I-V characteristics. The interface oxide capacitance Ci is extracted for the first time, as far as we know. Parameters of 4H-SiC Schottky diodes fabricated for testing in this paper are: the ideality factor n, the series resistance Rs, the zero-field barrier height ϕB0, the interface state density Dit, the interface oxide capacitance Ci and the neutral level of interface states ϕ0.