Energy Dispersive X-Ray Spectrometry by Microcalorimetry for the SEM
Energy Dispersive X-Ray Spectrometry by Microcalorimetry for the SEM
复制标题
用于 SEM 的微量热法能量色散 X 射线光谱分析
DOI：
10.1007/s006040200030
复制
发表时间：
2002
影响因子：
5.7
通讯作者：
J. Martinis
中科院分区：
文献类型：
--
作者：
D. Newbury;D. Wollman;S. Nam;G. Hilton;K. Irwin;J. Small;J. Martinis
随着微热量计能量色散X射线光谱仪(微卡EDS)的发展，电子束仪器的分析X射线光谱分析技术有了显著的进步。微卡EDS的工作原理是测量金属靶吸收单光子时的温升。温度计采用具有电热反馈和超导转变边传感器的低温电子电路。在能量色散操作中，高能光子(6000 eV)的光谱分辨率接近4.5 eV，低于2000 eV的低能光子接近2 eV，能量范围从250 eV到8 keV。各种材料的光谱显示了微卡EDS在扫描电子显微镜平台上操作时解决实际问题的能力。
Analytical X-ray spectrometry for electron beam instruments has advanced significantly with the development of the microcalorimeter energy dispersive X-ray spectrometer (µcal EDS). The µcal EDS operates by measuring the temperature rise when a single photon is absorbed in a metal target. A cryoelectronic circuit with electrothermal feedback and a superconducting transition edge sensor serves as the thermometer. Spectral resolution approaching 4.5 eV for high energy photons (6000 eV) and 2 eV for low energy photons below 2000 eV has been demonstrated in energy dispersive operation across a photon energy range from 250 eV to 8 keV. Spectra of a variety of materials demonstrate the power of the µcal EDS to solve practical problems while operating on a scanning electron microscope platform.