Contribution of the ion‐energy distribution to the current‐density distribution of a focused‐ion beam
Contribution of the ion‐energy distribution to the current‐density distribution of a focused‐ion beam
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离子能量分布对聚焦离子束电流密度分布的贡献
DOI：
10.1116/1.583616
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发表时间：
1987
期刊：
影响因子：
--
通讯作者：
S. Shukuri
中科院分区：
文献类型：
--
作者：
Y. Kawanami;T. Ishitani;K. Umemura;S. Shukuri
建立了聚焦离子束（FIB）在色差区电流密度分布的定积分表达式。利用实验获得的液态金属离子源的离子能量分布，估计其对FIB电流密度分布的贡献。计算结果解释了FIB的宽指数尾部。
A general expression for the current‐density distribution of a focused‐ion beam (FIB) in the chromatic‐aberration region is set up in the form of a definite integral. With the experimentally obtained ion‐energy distribution of a liquid‐metal ion source, its contribution to the FIB current‐density distribution is estimated. Calculated results explain the wide‐exponential tail of a FIB.