A reconfigurable ladder-shaped THz metamaterial integrated with a microelectromechanical cantilever array
A reconfigurable ladder-shaped THz metamaterial integrated with a microelectromechanical cantilever array
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DOI：
10.1063/5.0124601
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发表时间：
2023-01
影响因子：
4
通讯作者：
Ying Huang;Taiyu Okatani;N. Inomata;Y. Kanamori
中科院分区：
文献类型：
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作者：
Ying Huang;Taiyu Okatani;N. Inomata;Y. Kanamori
我们实验证明了一种微机电可重构梯形超材料（LS-MM）在太赫兹（THz）范围内工作。采用梁长为14 μm的超小型悬臂梁驱动器对LS-MM的每个单元进行独立整形，从而相应地切换THz波的传输响应。微机电驱动的LS-MM实现了60.1%的调谐对比度在0.78太赫兹和0.9拉德延迟在1.35太赫兹的传输相移通过关到开的重新配置。特别地，悬臂致动器由于其小尺寸而具有585 kHz的高机械谐振频率。微机电驱动的LS-MM有利地为需要快速可调谐传输调制的应用提供了一条途径，例如高分辨率THz成像和无线通信。
We experimentally demonstrate a microelectromechanically reconfigurable ladder-shaped metamaterial (LS-MM) operating in a terahertz (THz) range. Ultrasmall cantilever actuators with a beam length of 14 μm are employed to independently reshape each unit cell of the LS-MM, correspondingly switching the transmission response of THz waves. The microelectromechanically driven LS-MM achieves a tuning contrast of 60.1% in transmittance at 0.78 THz and a 0.9-rad delay in the transmission phase shift at 1.35 THz through the off-to-on reconfiguration. In particular, the cantilever actuator has a high mechanical resonant frequency of 585 kHz owing to its small size. The microelectromechanically driven LS-MM advantageously offers a pathway for applications requiring fast tunable transmission modulations, such as high-resolution THz imaging and wireless communications.