Advances and Applications of Atomic-Resolution Scanning Transmission Electron Microscopy
Advances and Applications of Atomic-Resolution Scanning Transmission Electron Microscopy
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DOI：
10.1017/s1431927621012125
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发表时间：
2021-08
影响因子：
2.8
通讯作者：
J. Liu
中科院分区：
文献类型：
--
作者：
J. Liu
虽然早在50年前就报道了单个重原子的扫描透射电子显微镜（STEM）图像，但直到在场发射STEM/TEM仪器上实际实现像差校正器形成亚-Ångstrom电子探针后，原子分辨率STEM成像的应用才得到广泛推广。电子光学系统的创新设计和进步，对电子-样品相互作用过程的基本理解以及探测器技术的进步都在实现实际材料的原子分辨率STEM成像目标方面发挥了重要作用。很明显，计算机技术和电子技术、图像采集和处理算法、图像模拟和精密加工的巨大进步协同作用，使原子分辨率的STEM成像成为常规。预计需要进一步的硬件/软件开发来实现具有单原子化学灵敏度的三维原子分辨率STEM成像，即使是电子束敏感材料。人工智能、机器学习和大数据科学有望显著增强STEM及其相关技术在许多研究领域的影响，如材料科学与工程、量子与纳米尺度科学、物理与化学、生物与医学。本文综述了从场发射电子枪的发明到像差校正和单色原子分辨率STEM的实现及其广泛应用的进展。
Abstract Although scanning transmission electron microscopy (STEM) images of individual heavy atoms were reported 50 years ago, the applications of atomic-resolution STEM imaging became wide spread only after the practical realization of aberration correctors on field-emission STEM/TEM instruments to form sub-Ångstrom electron probes. The innovative designs and advances of electron optical systems, the fundamental understanding of electron–specimen interaction processes, and the advances in detector technology all played a major role in achieving the goal of atomic-resolution STEM imaging of practical materials. It is clear that tremendous advances in computer technology and electronics, image acquisition and processing algorithms, image simulations, and precision machining synergistically made atomic-resolution STEM imaging routinely accessible. It is anticipated that further hardware/software development is needed to achieve three-dimensional atomic-resolution STEM imaging with single-atom chemical sensitivity, even for electron-beam-sensitive materials. Artificial intelligence, machine learning, and big-data science are expected to significantly enhance the impact of STEM and associated techniques on many research fields such as materials science and engineering, quantum and nanoscale science, physics and chemistry, and biology and medicine. This review focuses on advances of STEM imaging from the invention of the field-emission electron gun to the realization of aberration-corrected and monochromated atomic-resolution STEM and its broad applications.