Influence of the nitrogen pressure on the structure and properties of (Ti,Al)N coatings deposited by cathodic vacuum arc PVD process
Influence of the nitrogen pressure on the structure and properties of (Ti,Al)N coatings deposited by cathodic vacuum arc PVD process
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DOI：
10.1016/j.surfcoat.2003.10.058
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发表时间：
2004-03-01
影响因子：
5.4
通讯作者：
Kusinski, J
中科院分区：
文献类型：
--
作者：
Bujak, J;Walkowicz, J;Kusinski, J
本研究的目的是确定真空电弧沉积(Ti，Al)N涂层的性能与氮气压力和产生的等离子体组成的关系。采用Al_xTi1-x合金阴极，采用阴极电弧-真空法沉积(Ti，Al)N涂层，阴极成分为66.3at.%Al和33.7at.%Ti。在MZ-383工业多源弧真空装置上进行了氮气压力(3.0×10~(-3)mbar、8.0×10~(-3)mbar；1.3×10~(-2)mbar；3.0×10~(-2)mbar)、恒定衬底偏压(U偏置=-100 V)和恒弧电流(I=50 A)四个参数的实验。用中分辨率单色仪记录了300~500 nm范围内的等离子体发射光谱，光栅为1800线/mm，焦距为250 mm。用扫描电子显微镜(SEM)和X射线能谱(EDS)对涂层的结构和化学成分进行了分析。采用纳米压痕法和划痕试验法分别测定了涂层的硬度、杨氏模数和结合强度。确定了(Ti，Al)N涂层的氮气压力、等离子体成分、表面形貌与化学成分及力学性能之间的关系。(C)2003爱思唯尔B.V.保留所有权利。
The aim of the research was to define the dependence of the properties of vacuum arc deposited (Ti,Al)N coatings on the nitrogen pressure and resulting composition of the generated plasma. The investigated (Ti,AI)N coatings were deposited by the cathodic arc-vacuum method using AlxTi1-x alloy cathodes with composition of 66.3 at.% Al and 33.7 at.% Ti. Experiments were carried out on the industrial multi-source arc-vacuum device MZ-383 at four values of the nitrogen pressure (3.0 X 10(-3) mbar, 8.0 X 10(-3) mbar; 1.3 X 10(-2) mbar; 3.0 X 10(-2) mbar), constant substrate bias voltage (U-BIAS = -100 V) and constant arc current (I = 50 A). Emission spectra of plasma were recorded in the range from 300 to 500 nm using a medium-resolution monochromator with the optical grating of 1800 lines/mm and the focal distance of 250 mm. Scanning electron microscopy (SEM) and X-ray energy dispersive spectroscopy (EDS) were used to investigate the structure and chemical composition of the coatings. Hardness, Young's modulus and adhesion strength of the coatings were determined using the nano-indentation method and scratch test, respectively. The relation between the nitrogen pressure, plasma composition, surface morphology and chemical composition of (Ti,AI)N coatings as well as their mechanical properties was assigned. (C) 2003 Elsevier B.V. All rights reserved.