Fast and sensitive bolometric terahertz detection at room temperature through thermomechanical transduction
Fast and sensitive bolometric terahertz detection at room temperature through thermomechanical transduction
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DOI：
10.1063/1.5045256
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发表时间：
2019-04-21
影响因子：
3.2
通讯作者：
Hirakawa, Kazuhiko
中科院分区：
文献类型：
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作者：
Zhang, Ya;Hosono, Suguru;Hirakawa, Kazuhiko
太赫兹(THz)电磁频谱在无损和/或生物兼容传感方面引起了广泛的关注。为了广泛应用于太赫兹传感，研制能在室温下工作、灵敏度高、工作速度快的太赫兹传感器是非常重要的。然而，传统的室温太赫兹热传感器在这些特性方面达不到预期，这是包括太赫兹相机在内的各种太赫兹传感应用所需的。利用热机械换能器的原理，利用双钳制的砷化镓微电子机械系统(MEMS)梁谐振器作为热敏电阻，研制了一种非制冷、灵敏、快速的THz测辐射热计。由于其超高的温度灵敏度(噪声当量温差接近1muK/根赫兹)，该测辐射热计不仅实现了高灵敏度，而且工作带宽达到了几千赫兹，比其他非制冷太赫兹热敏传感器快了100多倍。得到的电噪声当量功率接近90PW/根赫兹，接近热涨落噪声的限值。MEMS测辐射热计采用标准的半导体制造工艺，非常适合制作用于实现太赫兹相机的探测器阵列。由AIP出版公司授权出版。
Terahertz (THz) electromagnetic spectrum draws wide attention for nondestructive and/or biocompatible sensing. In order to be widely applicable to the THz sensing, it is of prime importance to develop THz sensors that can be operated at room temperature and have high sensitivity and fast operation speed. However, conventional room-temperature THz thermal sensors fall short of expectations in these characteristics required in various applications of THz sensing, including THz cameras. Utilizing a thermomechanical transduction scheme, we have developed an uncooled, sensitive, and fast THz bolometer by using a doubly clamped GaAs microelectromechanical system (MEMS) beam resonator as a sensitive thermistor. Owing to its ultrahigh temperature sensitivity (the noise equivalent temperature difference of similar to 1 mu K/root Hz), the present bolometer achieves not only high sensitivity but also an operation bandwidth of several kHz, which is more than 100 times faster than other uncooled THz thermal sensors. The obtained electrical noise equivalent power is as low as similar to 90 pW/root Hz, which is close to the limit set by the thermal fluctuation noise. The MEMS bolometers are fabricated by the standard semiconductor fabrication processes and are well suited for making detector arrays for realizing THz cameras. Published under license by AIP Publishing.