Laser Direct Writing of Ultrahigh Sensitive SiC-Based Strain Sensor Arrays on Elastomer toward Electronic Skins
Laser Direct Writing of Ultrahigh Sensitive SiC-Based Strain Sensor Arrays on Elastomer toward Electronic Skins
复制标题
电子皮肤弹性体上激光直写超高灵敏碳化硅基应变传感器阵列
DOI：
10.1002/adfm.201806786
复制
发表时间：
2019-01-01
影响因子：
19
通讯作者：
Xuan, Fuzhen
中科院分区：
文献类型：
--
作者：
Gao, Yang;Li, Qi;Xuan, Fuzhen
电子皮肤作为医疗监护、人机接口和软机器人的重要平台得到了广泛的研究。然而，在不涉及高成本和复杂工艺的情况下，在弹性体衬底上形成无掩膜的图案化活性材料仍然是开发电子皮肤的一个巨大挑战。本文采用激光直写(LDW)技术在电子皮肤弹性体上制备了碳化硅基应变传感器阵列，该技术具有无掩模、高效、可扩展的特点。活性物质在弹性体上的直接合成归因于LDW诱导的硅氧烷转化为碳化硅。当激光功率为0.8W，扫描速度为1.25 mm S(-1)时，器件的最高灵敏度约为2.47×10(-5)。此外，LDW开发的设备提供了0.05%的最低应变检测下限，小的温度漂移，以及超过10000次循环的高机械耐久性。当它安装在人体皮肤上时，基于SIC的设备能够监测外部刺激和人体健康状况，并具有无线数据传输的能力。它在电子皮肤中的潜在应用被一个具有3×3碳化硅触觉传感器阵列的LDW制作的器件进一步证明。
Electronic skins (e-skins) have been widely investigated as important platforms for healthcare monitoring, human/machine interfaces, and soft robots. However, mask-free formation of patterned active materials on elastomer substrates without involving high-cost and complicate processes is still a grand challenge in developing e-skins. Here, SiC-based strain sensor arrays are fabricated on elastomer for e-skins by a laser direct writing (LDW) technique, which is mask-free, highly efficient, and scalable. The direct synthesis of active material on elastomer is ascribed to the LDW-induced conversion of siloxanes to SiC. The SiC-based devices own a highest sensitivity of approximate to 2.47 x 10(5) achieved at a laser power of 0.8 W and a scanning velocity of 1.25 mm s(-1). Moreover, the LDW-developed device provides a minimum strain detection limit of 0.05%, a small temperature drift, and a high mechanical durability for over 10 000 cycles. When it is mounted onto human skins, the SiC-based device is able to monitor external stimuli and human health conditions, with the capability of wireless data transmission. Its potential application in e-skins is further proved by an LDW-fabricated device having 3 x 3 SiC sensor array for tactile sensing.