A novel 6H-SiC UMOSFET_ACCUFET with low specific on-resistance and peak electric field

A novel 6H-SiC UMOSFET_ACCUFET with low specific on-resistance and peak electric field
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DOI:
10.1109/commad.2008.4802111
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发表时间:
2008-07
期刊:
2008 Conference on Optoelectronic and Microelectronic Materials and Devices
影响因子:
--
通讯作者:
M. Fathipour;N. Peyvast;N. Shoaazar
M. Fathipour;N. Peyvast;N. Shoaazar
中科院分区:
其他
文献类型:
--
作者:
M. Fathipour;N. Peyvast;N. Shoaazar

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In this paper, a novel power UMOSFET_ACCUFET structure, based-on 6H-SiC, has been investigated. By varying the dimensions and doping concentrations of specific regions, we have obtained optimized electric field and on-resistance. Two approaches have been applied to the simple UMOSFET structure, both of which result in lower peak electric field in the device in the blocking state.