Optical activities of large-area SU8 microspirals fabricated by multibeam holographic lithography.
Optical activities of large-area SU8 microspirals fabricated by multibeam holographic lithography.
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DOI：
10.1364/ao.53.002425
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发表时间：
2014-04
期刊：
影响因子：
1.9
通讯作者：
Xia Wang;Wensheng Gao;J. Hung;W. Tam
中科院分区：
文献类型：
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作者：
Xia Wang;Wensheng Gao;J. Hung;W. Tam
我们报道了使用6+1光束全息光刻（HL）技术在SU 8光刻胶中制作大面积微螺旋，该技术涉及六个线偏振侧光束和一个圆偏振中心光束的干涉。与普通的光刻胶基板（玻璃）配置相比，螺旋线是在具有预固化的薄SU 8光刻胶的基板上制造的。这种SU 8-SU 8-玻璃配置加强了螺旋与基板的附着，因此提高了制造的螺旋的质量。所制备的SU 8微螺旋显示出大的光学活性，在可见光范围内偏振旋转接近10度，圆二色性约为0.5。我们的预固化基底方法可以解除HL方法在制备大而均匀的微结构或纳米结构方面的限制。
We report on the fabrication of large-area microspirals in SU8 photoresist using a 6+1 beam holographic lithography (HL) technique involving the interference of six linearly polarized side beams and one circularly polarized central beam. In contrast to common photoresist-substrate (glass) configuration, the spirals are fabricated on a substrate with a precured thin SU8 photoresist. This SU8-SU8-glass configuration strengthens the attachment of the spirals to the substrate, and hence enhances the quality of the fabricated spirals. The fabricated SU8 microspirals exhibit large optical activities with a polarization rotation close to 10 deg and a circular dichroism of about 0.5 in the visible range. Our precured substrate method could lift the limitations of the HL method in fabricating large and uniform microstructures or nanostructures.