Tunable hybrid silicon nitride and thin-film lithium niobate electro-optic microresonator
Tunable hybrid silicon nitride and thin-film lithium niobate electro-optic microresonator
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DOI：
10.1364/ol.44.000618
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发表时间：
2019-02-01
期刊：
影响因子：
3.6
通讯作者：
Prather, Dennis W.
中科院分区：
文献类型：
--
作者：
Ahmed, Abu Naim R.;Shi, Shouyuan;Prather, Dennis W.
这封信介绍，据我们所知，第一个混合Si 3 N4-LiNbO 3为基础的可调谐微波谐振器的波导是通过加载一个Si 3 N4条上的电光（EO）材料的X切薄膜LiNbO 3。所开发的混合Si 3 N4-LiNbO 3微晶具有1.85 × 10（5）的高固有品质因数，环传播损耗为0.32 dB/cm，导致光谱线宽为13 pm，并且在光学C波段内对于横电模式的谐振消光比接近27 dB。利用LiNbO 3的电光效应，在1550 nm附近实现了1.78 pm/V的谐振调谐。(C)2019美国光学学会
This Letter presents, to the best of our knowledge, the first hybrid Si3N4-LiNbO3-based tunable microring resonator where the waveguide is formed by loading a Si3N4 strip on an electro-optic (EO) material of X-cut thin-film LiNbO3. The developed hybrid Si3N4-LiNbO3 microring exhibits a high intrinsic quality factor of 1.85 x 10(5), with a ring propagation loss of 0.32 dB/cm, resulting in a spectral linewidth of 13 pm, and a resonance extinction ratio of similar to 27 dB within the optical C-band for the transverse electric mode. Using the EO effect of LiNbO3, a 1.78 pm/V resonance tunability near 1550 nm wavelength is demonstrated. (C) 2019 Optical Society of America