Design and development of a MEMS-IDT gyroscope
Design and development of a MEMS-IDT gyroscope
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DOI：
10.1088/0964-1726/9/6/322
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发表时间：
2000-12-01
影响因子：
4.1
通讯作者：
Varadan, VV
中科院分区：
文献类型：
--
作者：
Varadan, VK;Suh, WD;Varadan, VV
介绍了一种基于声表面波谐振器（SAWR）和声表面波传感器的新型射频微机电系统（MEMS）陀螺的设计、研制和性能评价。大多数基于硅振动结构的MEMS陀螺仪利用两种振动模式之间的能量传递，其要求小的制造公差，以在没有旋转（即零速率输出）时最小化信号输出。这款1 cm x 1 cm的陀螺仪基于压电基板上的表面声波（SAW）原理工作。SAWR在叉指换能器（IDT）之间的空腔空间内产生SAW驻波。在驻波的波腹处的粒子经历垂直于衬底平面的大振幅振动，其用作该陀螺仪的参考振动运动。多个金属点（检验质量块）被策略性地定位在波腹位置处，使得由于旋转引起的科里奥利力的效应将放大在正交方向上生成的SAW的幅度。这74.2 MHz的MEMS-IDT陀螺仪的性能进行了评估，使用速率表和地震检波器设置，表示非常高的灵敏度和动态范围。这对于许多商业应用来说是理想的。与其他MEMS陀螺仪不同，该陀螺仪具有平面结构，没有悬挂的谐振机械结构。从而具有固有的坚固性和抗冲击性。鉴于其单层平面配置，该陀螺仪可用于需要共形安装到感兴趣表面上的应用。
The design, development and performance evaluation of a novel radio frequency microelectromechanical systems (MEMS) gyroscope, based on a surface acoustic wave resonator (SAWR) and a surface acoustic wave sensor is presented in this paper. Most of the MEMS gyroscopes based on silicon vibratory structures that utilize the energy transfer between the two vibratory modes demand small fabrication tolerances to minimize signal output when then is no rotation (i.e. zero rate output). This 1 cm x 1 cm gyroscope operates based on the principle of a surface acoustic wave (SAW) on a piezoelectric substrate. The SAWR creates SAW standing waves within the cavity space between the interdigital transducers (IDTs). The particles at the anti-nodes of a standing wave experience large amplitudes of vibration perpendicular to the plane of the substrate, which serves as the reference vibrating motion far this gyroscope. A number of metallic dots (proof masses) are strategically positioned at the anti-node locations so that the effect of the Coriolis force due to rotation will amplify the magnitude Of the SAW that is generated in the orthogonal direction. The performance of this 74.2 MHz MEMS-IDT gyroscope has been evaluated using rate table and geophone set-ups, indicating very high sensitivity and dynamic range. which is ideal for many of the commercial applications. Unlike other MEMS gyroscopes, this gyroscope has a planar configuration xith no suspended resonating mechanical structures. thereby being inherently robust and shock resistant. In View of its one-layer planar configuration, this gyroscope can be implemented for applications requiring conformal mounting onto a surface of interest.