In-Situ Surface Inspection Using White Light Channelled Spectrum Interferometer
In-Situ Surface Inspection Using White Light Channelled Spectrum Interferometer
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发表时间：
2015-03
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通讯作者：
Xiang Jiang;Dawei Tang;F. Gao
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作者：
Xiang Jiang;Dawei Tang;F. Gao
我们介绍了一种新的环境稳健的光学干涉系统，用于快速表面轮廓测量。提出的白色光通道光谱干涉仪（WLCSI）是有效的在线表面检测的应用，因为它可以在一个单一的拍摄获得的表面轮廓。与传统的光谱干涉测量技术相比，本系统采用柱面透镜作为迈克尔逊干涉物镜，实现了长轮廓的测量。结合现代高速CCD相机、通用图形处理器（GPGPU）和多核处理器计算技术，实现了高信噪比的大动态测量。设计的原型WLCSI和它的性能进行了实验评估，通过测量两个表面样品。测量结果与制造商给出的校准规格以及其他商业仪器的测量结果非常一致，这表明所提出的WLCSI可以应用于生产线，如卷到收费（R2R）表面检测，其中在质量控制方面仅关注膜表面上的缺陷
We introduce a new environmentally robust optical interferometry system for fast surface profile measurement. The proposed white light channelled spectrum Interferometer (WLCSI) is effective for applications in on-line surface inspection because it can obtain a surface profile in a single shot. Compared to the traditional spectral interferometry techniques, cylindrical lens is used in the Michelson interferometric objective of our system to achieve the measurement of long profiles. Combined with a modern high speed CCD camera, general-purpose graphics processing unit (GPGPU) and multi-core processors computing technology, large dynamic measurement with a high signal-to-noise ratio is realized. The designed prototype of WLCSI is presented and its performance was evaluated experimentally by measuring two surface samples. The measuring results closely align with the calibrated specifications given by the manufacturer as well as the measurement results by the other commercial instrument, which shows that the proposed WLCSI could be applied to production line like the roll-to-toll (R2R) surface inspection where only defects on the film surface are concerned in terms of the quality control