Microwave cavity-enhanced transduction for plug and play nanomechanics at room temperature.
Microwave cavity-enhanced transduction for plug and play nanomechanics at room temperature.
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DOI：
10.1038/ncomms1723
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发表时间：
2012-03-06
影响因子：
16.6
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随着最近对纳米机电系统(NEMS)中能量存储和损耗机制的深入了解，具有越来越高品质因数的纳米机械谐振器成为可能。因此，需要有效的、非耗散的换能器方案来避免耦合损耗的主要影响。在这里，我们提出了一种集成的NEMS换能器，该换能器基于微波腔介质耦合到双钳位的预应力氮化硅梁谐振器阵列。这种腔增强型检测方案允许在室温下分辨谐振器的布朗运动，同时在6.6 MHz时保持其29万的高机械品质因数。此外，我们的方法构成了一个‘光学’-机械系统，其中利用微波场的反作用效应来改变谐振器的有效阻尼。特别是，腔抽运的自振荡产生的线宽只有5赫兹。从而实现了只需两个微波连接器接口的免调节、全集成、自驱动的纳米机电谐振器阵列，在传感和信号处理方面具有潜在的应用价值。纳米机电系统的发展带来了纳米机械谐振器品质因数的提高，但在高温下几乎没有低损耗的换能器方案。使用非耗散介质耦合到微波腔，Faust等人。提出了一种集成的纳米机械换能器。
Following recent insights into energy storage and loss mechanisms in nanoelectromechanical systems (NEMS), nanomechanical resonators with increasingly high quality factors are possible. Consequently, efficient, non-dissipative transduction schemes are required to avoid the dominating influence of coupling losses. Here we present an integrated NEMS transducer based on a microwave cavity dielectrically coupled to an array of doubly clamped pre-stressed silicon nitride beam resonators. This cavity-enhanced detection scheme allows resolving of the resonators' Brownian motion at room temperature while preserving their high mechanical quality factor of 290,000 at 6.6 MHz. Furthermore, our approach constitutes an 'opto'-mechanical system in which backaction effects of the microwave field are employed to alter the effective damping of the resonators. In particular, cavity-pumped self-oscillation yields a linewidth of only 5 Hz. Thereby, an adjustement-free, all-integrated and self-driven nanoelectromechanical resonator array interfaced by just two microwave connectors is realised, which is potentially useful for applications in sensing and signal processing. Advances in nanoelectromechanical systems have brought improvements in the quality factor of nanomechanical resonators, yet few low-loss transduction schemes exist at high temperature. Using non-dissipative dielectric coupling to a microwave cavity, Faust et al. present an integrated nanomechanical transducer.
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