Multi-dimensional optical and laser-based diagnostics of low-temperature ionized plasma discharges
Multi-dimensional optical and laser-based diagnostics of low-temperature ionized plasma discharges
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DOI：
10.1088/0963-0252/20/5/053001
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发表时间：
2011-10
影响因子：
3.8
通讯作者：
E. Barnat
中科院分区：
文献类型：
--
作者：
E. Barnat
本文综述了利用多维光学诊断学研究射频等离子体放电现象的工作。诊断的范围从光学发射等被动技术到利用能够同时具有高时间和空间分辨率的纳秒激光的更主动技术。在这篇综述中，重点放在如果不使用这种诊断技术就会更难(如果不是不可能)进行的观察。例如，由两种不同金属组成的电极周围的鞘结构，在磁化氢放电中出现的双层，或者在射频放电中偏置探头周围的大范围耗尽的Ar 1s4能级。
A review of work centered on the utilization of multi-dimensional optical diagnostics to study phenomena arising in radiofrequency plasma discharges is given. The diagnostics range from passive techniques such as optical emission to more active techniques utilizing nanosecond lasers capable of both high temporal and spatial resolution. In this review, emphasis is placed on observations that would have been more difficult, if not impossible, to make without the use of such diagnostic techniques. Examples include the sheath structure around an electrode consisting of two different metals, double layers that arise in magnetized hydrogen discharges, or a large region of depleted argon 1s4 levels around a biased probe in an rf discharge.