Matching of maximum gauge factor and TCR zero crossing of Me-DLC
Matching of maximum gauge factor and TCR zero crossing of Me-DLC
复制标题
Me-DLC最大应变系数与TCR过零匹配
DOI：
--
复制
发表时间：
2011
期刊：
影响因子：
--
通讯作者：
G. Brauer
中科院分区：
文献类型：
--
作者：
Ulrike Heckmann;R. Bandorf;M. Petersen;Virginia Gwozdz;G. Brauer
含金属类金刚石碳（Me-DLC）是一种很有前途的高灵敏度温度补偿薄膜应变片材料。所讨论的材料在电阻温度系数的零交叉处提供大于10的应变计因子。使用Ni-DLC获得了迄今为止最好的结果。基于静态沉积的结果，研究了在动态条件下的工业上适合的工艺。在这两种情况下，可以实现约10的应变系数。但仍有进一步改进的余地。此外，Fe-DLC似乎是一个有趣的替代品。第一次调查表明，仪表系数高达约8与合理的温度补偿。
Metal containing diamond-like carbon (Me-DLC) is a promising material for temperature compensated thin film strain gauges with high strain sensitivity. The discussed material offers gauge factors above 10 at zero crossing of the temperature coefficient of resistance. With Ni-DLC the best results so far were obtained. Based on the results from static deposition an industrially suited process under dynamic conditions was investigated. In both cases gauge factors of approximately 10 could be realized. But there is still room for further improvement. Additionally, Fe-DLC seems to be an interesting alternative. First investigations show gauge factors up to approximately 8 with reasonable temperature compensation.