In-Situ Compensation on Temperature Coefficient of the Scale Factor for a Single-Axis Nano-g Force-Balance MEMS Accelerometer
In-Situ Compensation on Temperature Coefficient of the Scale Factor for a Single-Axis Nano-g Force-Balance MEMS Accelerometer
复制标题
单轴纳克力平衡MEMS加速度计比例因子温度系数的原位补偿
DOI：
10.1109/jsen.2021.3098797
复制
发表时间：
2021-09-15
影响因子：
4.3
通讯作者：
Tu, Liangcheng
中科院分区：
文献类型：
--
作者：
Liu, Dandan;Wu, Wenjie;Tu, Liangcheng
降低温度效应对高精度传感器至关重要。本文介绍了单轴电磁力平衡反馈MEMS加速度计标度因子温度系数的原位补偿方法的理论分析和实验验证。将微热敏电阻与加速度计集成在一起，对加速度计的温度变化进行实时检测。热敏电阻串联到压流电阻上，补偿加速度计受温度变化影响的比例系数变化。实验结果表明，在25 ~ 50℃的温度范围内，补偿加速度计的尺度因子温度系数在6 ppm/℃以内，比未补偿加速度计降低了68倍。该方法具有加工工艺兼容和原位补偿的优点，具有低成本、高效率的优点。
The reduction of temperature effect is vitally important for high precision sensors. This paper introduces the theoretical analysis and experimental verification of an in-situ compensation method on the temperature coefficient of the scale factor for a single-axis electromagnetic force-balance feedback MEMS accelerometer. A micro thermistor, fabricated together with the MEMS accelerometer, is integrated to in-situ sense the temperature variation of the accelerometer. The thermistor is connected to the voltage-to-current resistance in series, which compensates the variation of the scale factor of the accelerometer that is influenced by temperature variation. The experimental results reveal that the temperature coefficient of the scale factor of the compensated accelerometer is within 6 ppm/°C for the temperature range from 25°C to 50°C, which is reduced by 68 times compared with the uncompensated accelerometer. Benefiting from the compatible fabrication process and the in-situ compensation, the proposed method is promising to be low-cost and high-efficiency.