Controlled fabrication of single-walled carbon nanotube electrodes by electron-beam-induced oxidation
Controlled fabrication of single-walled carbon nanotube electrodes by electron-beam-induced oxidation
复制标题
电子束诱导氧化控制制备单壁碳纳米管电极
DOI：
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发表时间：
2011
期刊：
影响因子：
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通讯作者：
R. Krupke
中科院分区：
文献类型：
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作者：
C. Thiele;M. Engel;F. Hennrich;M. Kappes;Klaus;C. G. Frase;H. Lohneysen;R. Krupke
在有源器件结构下，研究了用电子束诱导氧化法制备金属单壁碳纳米管电极，电极间距一般为20nm。在此过程中连续测量管的电导。该实验提供了间隙大小的统计评估以及形成间隙所需的电子剂量。此外，还展示了平行精确切割多个碳纳米管的能力。为了证明该方法的实用性，采用分选碳纳米管和介电泳沉积制备了不同尺寸的器件。
The fabrication of metallic single-walled carbon nanotube electrodes separated by gaps of typically 20 nm width by electron-beam-induced oxidation is studied within an active device configuration. The tube conductance is measured continuously during the process. The experiment provides a statistical evaluation of gap sizes as well as the electron dose needed for gap formation. Also, the ability to precisely cut many carbon nanotubes in parallel is demonstrated. To show the practicality of the approach, devices of different scales were fabricated using sorted carbon nanotubes and dielectrophoretic deposition.